Plasma Cleaner

INTRODUCTION

 VSPI-88H

Features

 • PC Base Control / Windows XP / Touch Screen

 • 1kW / 13.56WH2 / Air Cooling, Safety Interlock

 • Dry Pump (Optional : Oil Pump)

 • 1 mass flow controller for Ar or other gas

 • (W)1200*(H)1850*(D)1350㎜ (System Dimension)

 • (W)350*(H)390*(D)260㎜ (Chamber Dimension)

 • 220VAC, 3Phase, 25A, 50/60㎐

 • 2MGZ

 • 620㎏